Design and Simulation of Bulk Micro-Machined Piezoresistivemems Accelerometer
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International Journal of Computer & Organization Trends (IJCOT) |  |
| © 2017 by IJCOT Journal | ||
| Volume - 8 Issue - 2 |
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| Year of Publication : 2018 | ||
| Authors : Meenakshi Arya, Ashavani Kumar, Ram Gopal | ||
| DOI : 10.14445/22492593/IJCOT-V8I2P304 |
Citation
Meenakshi Arya, Ashavani Kumar, Ram Gopal, "Design and Simulation of Bulk Micro-Machined Piezoresistivemems Accelerometer", International Journal of Computer & organization Trends (IJCOT), V8(2):24-34 March - April 2018, ISSN:2249-2593, www.ijcotjournal.org. Published by Seventh Sense Research Group.
Abstract
This paper reports the design and simulation of z-axis accelerometer having 8-spring configuration, thereby eliminating the undesired modes of oscillations, and allowing only the required mode of oscillation i.e. along the z-axis. Such design architecture of accelerometerwith piezoresistive sensing elements in Wheatstone bridge configurationenables the device to produce the output signal free from nonidealities.In this structure the proof mass is nested in square frame interconnected by eight springs, two springs at the each four corners of the proof mass and that of the frame. The proposed structure of accelerometer is then mathematically modelled and simulated by FEM using COMSOLsoftware to verify the design based on analytical formulation.
References
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Keywords
MEMS accelerometer, MEMS,bulk micromachining, von Mises stress, Wheatstone bridge