Photocatalysis in Carbon doped TiO2 thin films grown by DC magnetron sputtering

International Journal of Computer & Organization Trends  (IJCOT)          
© 2015 by IJCOT Journal
Volume - 5 Issue - 2
Year of Publication : 2015
AuthorsA. Karuppasamy


A. Karuppasamy"Photocatalysis in Carbon doped TiO2 thin films grown by DC magnetron sputtering", International Journal of Computer & organization Trends (IJCOT), V5(2):82-84 Mar - Apr 2015, ISSN:2249-2593, Published by Seventh Sense Research Group.

Abstract Pure and carbon doped TiO2 thin films were grown by reactive pulsed dc magnetron sputtering of titaniumin argon, oxygen and carbondioxide atmosphere. Sputtering density, argon and oxygen flow rates were maintained at 5W/cm2, 10 sccm and 6sccm, respectively whereas the carbondioxide flow rate was varied. The thin films were investigated for their structural, optical, morphological and photocatalytic properties. Carbon doped TiO2 thin films show a near visible bandedge (390 nm) and higher photocatalytic efficiency; degradation rate of methylene blue is 0.799 μmol/l.d.


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Photocatalysis, Sputtering, Thin films, and Oxides.